Efficient and stable CF4 decomposition over θ-Al2O3 with extraordinary resistance to HF

Environ. Sci.: Nano, 2023, Advance Article
DOI: 10.1039/D3EN00424D, Paper
Hang Zhang, Kang Liu, Yingkang Chen, Xiaojian Wang, Hongmei Li, Junwei Fu, Liyuan Chai, Zhang Lin, Min Liu
Regulating Al2O3 to θ phase is an effective method for enhancing the stability of CF4 decomposition.
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