Evaluations of the microstructures at the interface between the semipolar (10̄3) AlN epilayer and the m-plane (10̄0) sapphire substrate

CrystEngComm, 2023, 25,5296-5303
DOI: 10.1039/D3CE00700F, Paper
Xuqiang Shen, Hirofumi Matsuhata, Kazutoshi Kojima
We investigate the microstructures at the interface between the semipolar (10̄3) AlN epilayer and the m-plane (10̄0) sapphire substrate using electron microscopy techniques.
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