Micro-Joule heater and temperature sensor array on a suspended silicon nitride membrane for measurement of in-plane thin film thermal diffusivity
Publication date: 1 November 2023Source: Sensors and Actuators A: Physical, Volume 362Author(s): Felix Jiang, Laura Schaller, Meguya Ryu, Junko Morikawa, Sven Ingebrandt, Xuan Thang Vu Continue reading Micro-Joule heater and temperature sensor array on a suspended silicon nitride membrane for measurement of in-plane thin film thermal diffusivity